Ultrahigh vaccum Highprecision Four-freedom Munipulator

Applications :

The type is designed for sample operation in ultrhigh vacuum device, including clamping ,displacement , rotation and heating of sample . Manual or motor-dirven With Stepping motor grating ruler position, precision guide rail , ball screw, sophisticated structure.

Specifications :

• Leak rate : <10^-8Pa·L/S
• Bakeout temperature : 200°C
• Sample Heating temperature : 600°C
• X : ±30mm ±0.01mm
• Y : ±40mm ±0.01mm
• Z : ±40mm ±0.01mm
• Q : 360°  Manual