Laboratory mini vacuum magnetron sputtering coater
Specifications :
- Power : AC220V/50Hz/800W
- Magnetron power supply : 500w/DC600V/1A
- Magnetron target: 2" No.2
- Substrate: 100mm rotation
- Precision of film thickness: 0.1Å
- Vacuum pump: Made in china or imported
- Port of vacuum: KF40
- Ultimate vacuum : 3.0×10-4Pa
- Working vacuum :5.0×10-4Pa
- Using ambient temperature : <35°C
- Using ambient humidity: <75°C
- Using ambient altitude : <1500m
- Size: 440×240×260
- Weight: 47kg ( the vacuum pump is not included)
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