High-Vacuum deposition system for functional thin film

Descriptions

Reasonable linear-layout high vacuum deposition system makes it easy to facilitate, fewer cross contaminated, and nice for process. Multi-target magnetron sputtering, organic MBE, film thickness measurement, purification of organic materials, and ultra clean operation can be easily realized with this system It is most suitable for organic/inorganic film deposition or doping.

Specifications

• Vacuum: 10^-5Pa.
• Evaporation method: MBE/magnetron sputtering.
• Number of targets: 10(minimum sample mass can be as small as 5mg).
• Film thickness measurement range: 0-0.5mm.
• Procedure temperature control: up to 600°C for organic/1200°C for inorganic.
• Volume of sublimation boat: 50CC 5CC 0.5CC