Ultrahigh vacuum evaporation coating system

Main applications:

Deposition of metal films in ultrahigh vacuum environment, for laboratory use.

Specifications:

1. Evaporation chambers: Ø 320 × 360, double layered for water cooling.
2. Ultimate vacuum: 5 × 10^-5 Pa, pumped by molecular pump, with by-pass pump function.
3. Sample size: 100 × 100, motorized rotatory, speed adjustable.
4. Three sets of ceramic sealed water cooling evaporation electrode. Each with 200A maximum current at 12V. Baffles are provided for each electrode to prevent cross contamination.

Characteristics of the system

1. Sample holder is installed on upper cover, which can be moved vertically at motor driven for easy replacement of sample or raw materials.

2. Electrode switch is set at the front surface of the facility, which is convenient for electrode switch. Slide locking mechanism is adopted for reliable electrode contact.

3. All the manual operation or observation can be completed at the front of the facility. The facility is user friendly.