ZZ series vacuum evaporation coating facility

Main applications:

Different vertical standed , parallel typed , or box-type stainless steel vacuum chambers can be adopted for such vacuum evaporation coating facility . Vacuum evaporation of metal or other materials can be done . Deposition of optical films , semiconductor films , and metal films can be realized . It is widely used in material science , optics , electronics , and precision finishing , etc.

Specifications:

• Evaporation chambers: Ø 450 × 550
• Ultimate vacuum : 6.6 × 10 ^-5Pa , pumped by molecular pump
• Evaporation source : resistance heating , 2 - 7 sets
• Power supply : 2 - 3 KW
• Sample size : Ø 300
• Baking temperature : 200 ° C
• Ion bombardment : 0.6KW 3KV(D.C)