ZD series e-beam evaporation coating system

Main applications :

This series is the enhanced version of ZZ series . An additional e-beam evaporation source is installed for refractory metal or nonmetal materials , to improve the film quality and the purity of coating layer . Deposition of optical films , semiconductor films , and metal films can be realized .

Specifications :

• Ultimate vacuum : 6.6 × 10^-5Pa , pumped by molecular pump
• Evaporation chamber : Ø 450 × Ø 600 mm
• E - beam evaporation source : 3KW 6KW
• Sample size : Ø 300
• Heating temperature : 200°C