Large-scale high vacuum coating system with e-beam and thermal evaporation source

This system is specially designed for coating metal films or multilayered dielectric films on large optical surface , such as diffraction gratings as large as 420 × 660 × 100 mm³

Main applications :

Deposition of multilayered dielectrical films or metal films on large surface at laboratory.

Specifications :

1. Largest substrate dimension : 420 × 660 × 100 mm² .
2. Ultimate vacuum : 8 × 10^-5Pa
3. Film thickness : 15 µ m for metal film
4. Homogeneity of the film thickness : ± 2% in 400 × 500 mm² area
5. Insitu monitoring of film thickness